Back
Achieving Micron Precision Alignment
Lateral
<2 microns
Longitudinal
<10 microns
How do we plan to mitigate warpage?
Si V-groove bridge engages to ridges on the SiPho
IC & stops here
Precision Si V-Groove bridge engages with Fibers of
the FAU & Lithography defined mechanical ridges on the SiPho IC - help achieve micron precision
alignment
Precision part attached at the CoWoS step in assembly - lower section made transparent for clarity
PIC Mode
Fiber Mode